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SPIE Proceedings [SPIE SPIE Optics + Optoelectronics - Prague, Czech Republic (Monday 18 April 2011)] EUV and X-Ray Optics: Synergy between Laboratory and Space II - Multilayers for next generation EUVL at 6.X nm

✍ Scribed by Platonov, Yuriy; Rodriguez, Jim; Kriese, Michael; Gullikson, Eric; Harada, Tetsuo; Watanabe, Takeo; Kinoshita, Hiroo; Hudec, René; Pina, Ladislav

Book ID: 120424412
Publisher: SPIE
Year: 2011
Weight: 361 KB
Volume: 8076
Category: Article
DOI: 10.1117/12.889519

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