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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Efficient and stable numerical method for evaluation of Zernike polynomials and their Cartesian derivatives

✍ Scribed by Novák, Pavel; Novák, Jíří; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.

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