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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Modeling of Risley prisms devices for exact scan patterns

✍ Scribed by Schitea, Alexandru; Tuef, Marius; Duma, Virgil-Florin; Vlaicu, Aurel M.; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.

Book ID: 120577366
Publisher: SPIE
Year: 2013
Weight: 816 KB
Volume: 8789
Category: Article
DOI: 10.1117/12.2020386

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