SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Miniature low-cost extrinsic Fabry-Perot interferometer for low-pressure detection

✍ Scribed by Poeggel, Sven; Lehmann, Peter H.; Osten, Wolfgang; Tosi, Daniele; Leen, Gabriel; Albertazzi, Armando; Lewis, Elfed

• Book ID: 121382428
• Publisher: SPIE
• Year: 2013
• Weight: 582 KB
• Volume: 8788
• Category: Article
• DOI: 10.1117/12.2019799