SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Optical Manufacturing and Testing X - Wavefront retrieval for cross-grating lateral shearing interferometer based on differential Zernike polynomial fitting

✍ Scribed by Ling, Tong; Liu, Dong; Sun, Lei; Yang, Yongying; Cheng, Zhongtao; Fähnle, Oliver W.; Williamson, Ray; Kim, Dae Wook

• Book ID: 121488502
• Publisher: SPIE
• Year: 2013
• Weight: 907 KB
• Volume: 8838
• Category: Article
• DOI: 10.1117/12.2023621