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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - X-ray diffraction in optical microsystems technology

✍ Scribed by Berti, Giovanni; Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang

No coin nor oath required. For personal study only.

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