SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - A multipoint diffraction strain sensor using a micro-lens array: from theory to application

✍ Scribed by Wang, Jun; Asundi, Anand; Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang

• Book ID: 121476252
• Publisher: SPIE
• Year: 2008
• Weight: 566 KB
• Volume: 6995
• Category: Article
• DOI: 10.1117/12.782614