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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - Tomography using multiple wavelengths in digital holography: method, simulations, and experiments

✍ Scribed by Montfort, Frédéric; Charrière, Florian; Colomb, Tristan; Kuehn, Jonas; Cuche, Etienne; Depeursinge, Christian; Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang


Book ID
121080674
Publisher
SPIE
Year
2006
Weight
729 KB
Volume
6188
Category
Article

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