𝔖 Bobbio Scriptorium

✦ LIBER ✦

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - High-performance multilayer coatings for EUV lithography

✍ Scribed by Spiller, Eberhard; Khounsary, Ali M.; Dinger, Udo; Ota, Kazuya

Book ID: 121435846
Publisher: SPIE
Year: 2004
Weight: 274 KB
Volume: 5193
Category: Article
DOI: 10.1117/12.507237

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE Optical Science a

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing

✍ Kierey, Holger; Heidemann, Klaus F.; Kleemann, Bernd H.; Winters, Renate; Egle, 📂 Article 📅 2004 🏛 SPIE ⚖ 585 KB

SPIE Proceedings [SPIE Optical Science a

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - Multilayer mirror design for different applications in the XUV using a versatile simulation program

✍ Graf, Thomas G.; Michette, Alan G.; Powell, A. Keith; Khounsary, Ali M.; Dinger, 📂 Article 📅 2004 🏛 SPIE ⚖ 573 KB

SPIE Proceedings [SPIE Optical Science a

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - Development of an extreme-ultraviolet imaging spectrometer for the Mercury mission

✍ Yoshikawa, Ichiro; Murachi, Tetsunori; Kameda, Shingo; Yamazaki, Atsushi; Okano, 📂 Article 📅 2004 🏛 SPIE ⚖ 394 KB

SPIE Proceedings [SPIE Optical Science a

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications - Micro x-ray sources from femtosecond laser plasmas

✍ Serbanescu, Cristina G.; Santiago, Jaime; Fedosejevs, Robert; Kyrala, George A.; 📂 Article 📅 2004 🏛 SPIE ⚖ 160 KB

SPIE Proceedings [SPIE Optical Science a

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications - Liquid-metal anode x-ray tube

✍ David, Bernd R.; Barschdorf, Hans; Doormann, Volker; Eckart, Rainer; Harding, Ge 📂 Article 📅 2004 🏛 SPIE ⚖ 408 KB

SPIE Proceedings [SPIE Optical Science a

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Moire interferometry formulas for hard x-ray wavefront sensing

✍ Weitkamp, Timm; Diaz, A.; Nohammer, Bernd; Pfeiffer, Franz; Stampanoni, Marco; Z 📂 Article 📅 2004 🏛 SPIE ⚖ 88 KB