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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Testing of a prototype velocity sensor with an internal feedback control loop

✍ Scribed by Gavagni, Marco; Ronzoni, Alessandro; Gardonio, Paolo; Elliott, Stephen J.; Cane, Carles; Chiao, Jung-Chih; Vidal Verdu, Fernando

Book ID: 120617746
Publisher: SPIE
Year: 2005
Weight: 760 KB
Volume: 5836
Category: Article
DOI: 10.1117/12.608630

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