SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Thermoelectric properties of bismuth telluride thin films deposited by radio frequency magnetron sputtering

✍ Scribed by Tan, J.; Kalantar-zadeh, K.; Wlodarski, W.; Bhargava, S.; Akolekar, D.; Holland, A.; Rosengarten, G.; Cane, Carles; Chiao, Jung-Chih; Vidal Verdu, Fernando

• Book ID: 120081133
• Publisher: SPIE
• Year: 2005
• Weight: 458 KB
• Volume: 5836
• Category: Article
• DOI: 10.1117/12.609819