SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX - Electron storage rings as x-ray lithography sources: an overview

✍ Scribed by Murphy, James B.; Resnick, Douglas J.

• Book ID: 121503826
• Publisher: SPIE
• Year: 1990
• Weight: 371 KB
• Volume: 1263
• Category: Article
• DOI: 10.1117/12.20151