𝔖 Bobbio Scriptorium

✦ LIBER ✦

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Characterization, modeling, and impact of scattered light in low-k1 lithography

✍ Scribed by La Fontaine, Bruno; Deng, Yunfei; Dusa, Mircea; Acheta, Alden; Fumar-Pici, Anita; Bolla, Harish; Cheung, Beverly; Singh, Bhanwar; Levinson, Harry J.; Smith, Bruce W.

Book ID: 121658559
Publisher: SPIE
Year: 2005
Weight: 378 KB
Volume: 5754
Category: Article
DOI: 10.1117/12.601188

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE Microlithography

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Development of polarized-light illuminator and its impact

✍ Nishinaga, Hisashi; Tokuda, Noriaki; Owa, Soichi; Hirukawa, Shigeru; Tanitsu, Os 📂 Article 📅 2005 🏛 SPIE ⚖ 610 KB

SPIE Proceedings [SPIE Microlithography

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Etch modeling for accurate full-chip process proximity correction

✍ Beale, Daniel F.; Shiely, James P.; Smith, Bruce W. 📂 Article 📅 2005 🏛 SPIE ⚖ 106 KB

SPIE Proceedings [SPIE Microlithography

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Optimized hardware and software for fast full-chip simulation

✍ Cao, Yu; Lu, Yen-Wen; Chen, Luoqi; Ye, Jun; Smith, Bruce W. 📂 Article 📅 2005 🏛 SPIE ⚖ 225 KB

SPIE Proceedings [SPIE Microlithography

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Effect of data selection and noise on goodness of OPC model fit

✍ Schlief, Ralph E.; Smith, Bruce W. 📂 Article 📅 2005 🏛 SPIE ⚖ 425 KB

SPIE Proceedings [SPIE Microlithography

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride

✍ Ladison, Julie L.; Price, James J.; Helfinstine, John D.; Rosch, William R.; Smi 📂 Article 📅 2005 🏛 SPIE ⚖ 224 KB

SPIE Proceedings [SPIE Microlithography

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - How to describe polarization influence on imaging (Invited Paper)

✍ Totzeck, M.; Graupner, P.; Heil, T.; Gohnermeier, A.; Dittmann, O.; Krahmer, D.; 📂 Article 📅 2005 🏛 SPIE ⚖ 447 KB