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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride

โœ Scribed by Ladison, Julie L.; Price, James J.; Helfinstine, John D.; Rosch, William R.; Smith, Bruce W.


Book ID
120195297
Publisher
SPIE
Year
2005
Weight
224 KB
Volume
5754
Category
Article

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