SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - How to describe polarization influence on imaging (Invited Paper)

✍ Scribed by Totzeck, M.; Graupner, P.; Heil, T.; Gohnermeier, A.; Dittmann, O.; Krahmer, D.; Kamenov, V.; Ruoff, J.; Flagello, D.; Smith, Bruce W.

• Book ID: 115526484
• Publisher: SPIE
• Year: 2005
• Weight: 447 KB
• Volume: 5754
• Category: Article
• DOI: 10.1117/12.599908