SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Design and Process Integration for Microelectronic Manufacturing III - Manufacturing-aware design methodology for assist feature correctness

✍ Scribed by Gupta, Puneet; Kahng, Andrew B.; Park, Chul-Hong; Liebmann, Lars W.

• Book ID: 120451167
• Publisher: SPIE
• Year: 2005
• Weight: 249 KB
• Volume: 5756
• Category: Article
• DOI: 10.1117/12.604872