SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Metrology, Inspection, and Process Control for Microlithography XIX - From CD to 3D sidewall roughness analysis with 3D CD-AFM

✍ Scribed by Foucher, Johann; Silver, Richard M.

• Book ID: 120018739
• Publisher: SPIE
• Year: 2005
• Weight: 923 KB
• Volume: 5752
• Category: Article
• DOI: 10.1117/12.599229