SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Experimental verification of a model-based decomposition method for double dipole lithography

✍ Scribed by Eurlings, Mark; Hsu, Stephen D.; Hendrickx, Eric; op 't Root, Willem; Laidig, Thomas L.; Chiou, Tsann-Bim; Chen, Alek; Chen, Fung; Vandenberghe, Geert; Finders, Jo; Smith, Bruce W.

• Book ID: 120451165
• Publisher: SPIE
• Year: 2004
• Weight: 437 KB
• Volume: 5377
• Category: Article
• DOI: 10.1117/12.535221