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SPIE Proceedings [SPIE 1986 International Symposium/Innsbruck - Innsbruck, Austria (Tuesday 15 April 1986)] Thin Film Technologies II - Ion And Photon-Beam Assisted Deposition Of Thin Films

✍ Scribed by Macleod, H A.; Jacobsson, J. Roland

Book ID: 115471749
Publisher: SPIE
Year: 1986
Weight: 474 KB
Volume: 652
Category: Article
DOI: 10.1117/12.938384

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