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SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - High quality HfO2 thin films prepared by reactive ion beam assisted deposition

✍ Scribed by Wang, Congjuan; Jin, Yunxia; Shao, Jianda; Fan, Zhengxiu; Yang, Li; Chen, Yaolong; Kley, Ernst-Bernhard; Li, Rongbin

Book ID: 120460306
Publisher: SPIE
Year: 2007
Weight: 328 KB
Volume: 6722
Category: Article
DOI: 10.1117/12.783567

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