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SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Study on chemical mechanical polishing process of lithium niobate

✍ Scribed by Wang, Shengli; Liu, Yuling; Li, Zhenxia; Yang, Li; Chen, Yaolong; Kley, Ernst-Bernhard; Li, Rongbin

Book ID: 121353018
Publisher: SPIE
Year: 2007
Weight: 213 KB
Volume: 6722
Category: Article
DOI: 10.1117/12.783529

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