✦ LIBER ✦

Spectroscopic ellipsometry study on the structure of Ta2O5/SiOxNy/Si gate dielectric stacks

✍ Scribed by Yi-Sheng Lai; J.S Chen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of Hf doping on interfacial la

✍ Karmakov, Y.; Paskaleva, A. 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 816 KB

Degradation behavior of Ta2O5 stacks and

✍ Atanassova, E.; Stojadinovic, N.; Paskaleva, A. 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 214 KB

Theoretical and experimental study of th

✍ C. Chaneliere; J.L. Autran; S. Four; R.A.B. Devine; B. Balland 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 219 KB

Effects of Plasma Prenitridation and Pos

✍ Lai, Yi-Sheng; Chen, Kuan-Jen; Chen, J. S. 📂 Article 📅 2002 🏛 The Electrochemical Society 🌐 English ⚖ 134 KB

Depth profiles of Ta2O5/SiO2/Si structur

✍ P. Gimmel; B. Gompf; D. Schmeißer; W. Göpel 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 434 KB

Numerical study on the spectroscopic ell

✍ Watanabe, Koki; Pistora, Jaromír; Foldyna, Martin; Postava, Kamil; Vlcek, Jarosl 📂 Article 📅 2005 🏛 Optical Society of America 🌐 English ⚖ 531 KB