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Theoretical and experimental study of the conduction mechanism in Al/Ta2O5/SiO2/Si and Al/Ta2O5/Si3N4/Si structures

✍ Scribed by C. Chaneliere; J.L. Autran; S. Four; R.A.B. Devine; B. Balland


Book ID
117149548
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
219 KB
Volume
245
Category
Article
ISSN
0022-3093

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