✦ LIBER ✦
Depth profiles of Ta2O5/SiO2/Si structures: a combined X-ray photoemission, Auger electron, and secondary ion mass spectroscopic study
✍ Scribed by P. Gimmel; B. Gompf; D. Schmeißer; W. Göpel
- Book ID
- 112376605
- Publisher
- Springer
- Year
- 1989
- Tongue
- English
- Weight
- 434 KB
- Volume
- 333
- Category
- Article
- ISSN
- 1618-2650
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