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Spectroscopic ellipsometry for in-line monitoring of silicon nitrides

✍ Scribed by Candi S. Cook; Terry Daly; Ran Liu; Michael Canonico; Q. Xie; R.B. Gregory; Stefan Zollner

Book ID: 113936721
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 147 KB
Volume: 455-456
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2003.11.265

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