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Spectroscopic and image intensified investigations of RF plasmas in H2 and CH4 mixtures

โœ Scribed by Itoh, H.; Takeyama, Y.; Ikeda, M.; Satoh, K.; Nakao, Y.; Tagashira, H.


Book ID
114456771
Publisher
The Institution of Electrical Engineers
Year
1994
Tongue
English
Weight
369 KB
Volume
141
Category
Article
ISSN
1350-2344

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