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Investigations of CH 4 , C 2 H 2 and C 2 H 4 dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry

✍ Scribed by Deschenaux, Ch; Affolter, A; Magni, D; Hollenstein, Ch; Fayet, P

Book ID: 120656654
Publisher: Institute of Physics
Year: 1999
Tongue: English
Weight: 313 KB
Volume: 32
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/32/15/316

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