✦ LIBER ✦

Spectroellipsometric characterization of thin silicon nitride films

✍ Scribed by Zhong-Tao Jiang; Tomuo Yamaguchi; Mitsuru Aoyama; Yoichiro Nakanishi; Leo Asinovsky

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of ion-plated silicon n

✍ Juergen Ramm; Ralph E. Pixley 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 809 KB

Spectroscopic ellipsometry characterizat

✍ G.E. Jellison; Jr; F.A. Modine; P. Doshi; A. Rohatgi 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 140 KB

Characterization of laser-ablated boron

✍ R.W. Pryor; Z.L. Wu; K.R. Padmanabhan; S. Villanueva; R.L. Thomas 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Preparation and characterization of reac

✍ S.K. Ghosh; T.K. Hatwar 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 505 KB

Spectroellipsometric assessment of HfO2

✍ O. Buiu; Y. Lu; I.Z. Mitrovic; S. Hall; P. Chalker; R.J. Potter 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 422 KB

Characterization of low pressure chemica

✍ L.I. Popova; B.Z. Antov; A.V. Shopov; M.S. Sotirova; G.D. Beshkov; E.N. Stefanov 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 717 KB