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Specific features of molecules’ pyrolysis on the epitaxial surface in the case of growth of the Si1 −xGexlayers from hydrides in vacuum

✍ Scribed by L. K. Orlov; S. V. Ivin


Book ID
111443689
Publisher
Springer
Year
2007
Tongue
English
Weight
241 KB
Volume
41
Category
Article
ISSN
1063-7826

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