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Spatial distribution of backscattered electrons in the scanning electron microscope and electron microprobe

โœ Scribed by Murata, Kenji

Book ID
121300117
Publisher
American Institute of Physics
Year
1974
Tongue
English
Weight
784 KB
Volume
45
Category
Article
ISSN
0021-8979

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A new coaxial detection system for backscattered electrons in SEM is described. This coaxial detection system allows us to collect only the backscattered electrons that have lost a small percentage of the primary energy, emerging from the sample surface with a take-off angle defined by the objective