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Measuring the backscattering coefficient and secondary electron yield inside a scanning electron microscope

โœ Scribed by L. Reimer; C. Tollkamp


Book ID
112188004
Publisher
Hindawi Limited
Year
1980
Tongue
English
Weight
419 KB
Volume
3
Category
Article
ISSN
0161-0457

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A new type of scanning electron microsco
โœ C.Z Jiang; P Morin; N Rosenberg ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 394 KB

A new coaxial detection system for backscattered electrons in SEM is described. This coaxial detection system allows us to collect only the backscattered electrons that have lost a small percentage of the primary energy, emerging from the sample surface with a take-off angle defined by the objective