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Exit angle dependence of penetration depth of backscattered electrons in the scanning electron microscope

โœ Scribed by Murata, K.


Publisher
John Wiley and Sons
Year
1976
Tongue
English
Weight
597 KB
Volume
36
Category
Article
ISSN
0031-8965

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A new type of scanning electron microsco
โœ C.Z Jiang; P Morin; N Rosenberg ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 394 KB

A new coaxial detection system for backscattered electrons in SEM is described. This coaxial detection system allows us to collect only the backscattered electrons that have lost a small percentage of the primary energy, emerging from the sample surface with a take-off angle defined by the objective