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Source/drain contact resistance of silicided thin-film SOI MOSFET's

โœ Scribed by Suzuki, K.; Tanaka, T.; Tosaka, Y.; Sugii, T.; Andoh, S.


Book ID
114535741
Publisher
IEEE
Year
1994
Tongue
English
Weight
504 KB
Volume
41
Category
Article
ISSN
0018-9383

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