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Some mechanical and thermal properties of PECVD a-SixC1−x: H and a-SixN1−x: H films prepared by mixed frequency plasma processes

✍ Scribed by V.J. Minkiewicz; J. Stasiak; R.L. White; R.W. Cornell; J.O. Moore; R. Eaton; J.M. Eldridge; F.C. Lee

No coin nor oath required. For personal study only.

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