SOI nanophotonic waveguide structures fabricated with deep UV lithography

✍ Scribed by W. Bogaerts; P. Dumon; D. Taillaert; V. Wiaux; S. Beckx; B. Luyssaert; J. Van Campenhout; D. Van Thourhout; R. Baets

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 398 KB
• Volume: 2
• Category: Article
• ISSN: 1569-4410
• DOI: 10.1016/j.photonics.2004.07.002