✦ LIBER ✦
Fabrication of buried GaAlAs NM-structures by deep UV holographic lithography and MBE growth on finely channelled substrates
✍ Scribed by U. Marti; M. Proctor; D. Martin; F. Morier-Genoud; B. Senior; F.K. Reinhart
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 510 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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