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3D structures for UV-NIL template fabrication with grayscale e-beam lithography

โœ Scribed by Guido Piaszenski; Ulrich Barth; Axel Rudzinski; Andreas Rampe; Andreas Fuchs; Markus Bender; Ulrich Plachetka

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
743 KB
Volume
84
Category
Article
ISSN
0167-9317

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