✦ LIBER ✦
Fabrication of 3D patterns with vertical and sloped sidewalls by grayscale electron-beam lithography and thermal annealing
✍ Scribed by Arne Schleunitz; Helmut Schift
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 434 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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