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Size effect on the static behavior of electrostatically actuated microbeams

โœ Scribed by Li Yin; Qin Qian; Lin Wang


Publisher
The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences
Year
2011
Tongue
English
Weight
330 KB
Volume
27
Category
Article
ISSN
0567-7718

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Size-effect on stress behavior of the Al
โœ D. Chen; Y.M. Wang; X.L. Ma ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 562 KB

The stress behavior of AlN/TiN superlattice film has been studied by means of a crystal-chemical atomic dynamics simulation based on first-principles calculations. The size-effects on stress behavior are demonstrated and discussed in detail. Stress behavior depends not only on AlN thickness but also