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Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors

✍ Scribed by Ghader Rezazadeh; Faraz Khatami; Ahmadali Tahmasebi

Publisher: Springer-Verlag
Year: 2007
Tongue: English
Weight: 291 KB
Volume: 13
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0362-1

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