✦ LIBER ✦
Investigation of the internal stress effects on static and dynamic characteristics of an electrostatically actuated beam for MEMS and NEMS application
✍ Scribed by A. Bhushan; M. M. Inamdar; D. N. Pawaskar
- Publisher
- Springer-Verlag
- Year
- 2011
- Tongue
- English
- Weight
- 844 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0946-7076
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