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Single and multiple profile fitting of AES and XPS intensity-depth profiles for analysis of interdiffusion in thin films

✍ Scribed by Noah, Martin A.; Flötotto, David; Wang, Zumin; Mittemeijer, Eric J.

Book ID
121786550
Publisher
John Wiley and Sons
Year
2014
Tongue
English
Weight
584 KB
Volume
46
Category
Article
ISSN
0142-2421

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Thin titanium hydride (TiH y ) films, covered by ultrathin gold layers, have been compared with the corresponding titanium films after analysis using a combination of time-of-flight SIMS (ToF-SIMS), XPS and AES. The TiH y layers were prepared under UHV conditions by precisely controlled hydrogen sor