Examples for the improvements in AES depth profiling of multilayer thin film systems by application of factor analysis data evaluation

✍ Scribed by U. Scheithauer

• Book ID: 120751839
• Publisher: Springer
• Year: 1995
• Tongue: English
• Weight: 391 KB
• Volume: 353
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/BF00322089