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Simultaneous optical measurement of Ge-content and carbon doping in strained epitaxial SiGe films

✍ Scribed by S. Morris; D. Le Cunff; D. Ristoiu; V. Vachellerie; F. Deleglise; D. Dutartre

No coin nor oath required. For personal study only.

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Simultaneous optical measurement of Ge c

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Simultaneous optical measurement of Germ

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Strain in ultrathin epitaxial films of G

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[Opt. Soc. America Technical Digest. Sum

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