Simultaneous optical measurement of Germanium content and Boron doping in strained heteroepitaxial SiGe films using a novel data-analysis technique

✍ Scribed by S.J. Morris; P. Fougeres; S. Bozzo-Escoubas; S. Bodnar; S. Gaillard

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 339 KB
• Volume: 7
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2004.09.120