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Simulation of electromigration behaviour in Al metallization of integrated circuits

✍ Scribed by M. Scherge; V. Breternitz; Ch. Knedlik

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 229 KB
Volume: 32
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(92)90083-w

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