Simulation of dopant diffusion and activation during flash lamp annealing

✍ Scribed by Christoph Zechner; Dmitri Matveev; Nikolas Zographos; Wilfried Lerch; Silke Paul

• Book ID: 103843923
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 378 KB
• Volume: 154-155
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2008.10.005