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Effect of Flash Lamp Annealing and Laser Spike Annealing on Random Dopant Fluctuation of 15-nm Metal-Oxide-Semiconductor Devices

✍ Scribed by Cheng, Hui-Wen; Hwang, Chih-Hong; Chao, Ko-An; Li, Yiming

Book ID: 111904042
Publisher: American Scientific Publishers
Year: 2012
Tongue: English
Weight: 741 KB
Volume: 12
Category: Article
ISSN: 1533-4880
DOI: 10.1166/jnn.2012.5807

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