Simulation of chemical mechanical planarization of copper with molecular dynamics

✍ Scribed by Ye, Y.; Biswas, R.; Bastawros, A.; Chandra, A.

• Book ID: 120323994
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 538 KB
• Volume: 81
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1505113