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SIMS system for the analysis of sputtered ions during ion implantation

✍ Scribed by Haberland, D.; Harde, P.; Nelkowski, H.; Schlaak, W.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The mechanism of simultaneous implantati

✍ J.C.C. Tsai; J.M. Morabito 📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 335 KB

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✍ M. Ullrich; A. Burenkov; H. Ryssel 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 446 KB

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✍ DE Sykes; RT Blunt 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 246 KB

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Flexible megavolt system for ion implant

✍ H.A.P. Van Oosterhout 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 405 KB